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https://www.brooksinstrument.com/en/blog/new-vapor-delivery-module-for-demanding-semiconductor-fabrication
Jan 16, 2018 · The result: Semiconductor photoresist strip and polymer residue removal processes that require the use of DI water vapor have the level of accuracy, repeatability and cleanliness that today’s most demanding semiconductor fabrication processes require. VDM300: Newest generation of Vapor Delivery Modules
https://www.brooksinstrument.com/en/products/semiconductor-products/liquid-vapor
Semiconductor liquid and vapor delivery technology from Brooks use unique atomization and heat exchanger technologies for the highest purity vaporFluid Type: DI Water
https://www.veeco.com/technologies-and-products/gas-and-vapor-delivery-systems
Veeco’s gas and vapor delivery systems address critical issues facing semiconductor manufacturers and foundries, including material costs, process repeatability and system up-time. Click here to access Veeco's Piezocon Chemical Parameters Database.
https://www.veeco.com/markets/semiconductor
Gas & Vapor Delivery Systems. Veeco’s gas and vapor delivery systems address critical issues facing semiconductor manufacturers and foundries, including material costs, process repeatability and system up …
https://cerestechnologies.com/products/semiconductor-renewable-energy/
Ceres' ChemSource™ series high-purity precursor liquid delivery systems are designed especially for use in Chemical Vapor Deposition applications (Models CS-150 and CS-250) and with our patented Self-Metering Reservoir (SMR) vapor delivery systems (Model 2100).
https://www.nist.gov/industry-impacts/semiconductor-thin-film-design-optimization
Vapor deposition thin film growth depends on controlled delivery of chemical precursors to the silicon wafer surface. Semiconductor equipment manufacturers use NIST measurement methods and data analysis to improve their systems for optimal vapor deposition film growth.
https://www.semi.org/en/press/semicon-taiwan-2017-new-deionized-water-vapor-delivery-module-brooks-instrument-0
SEMICON Taiwan 2017: New Deionized Water Vapor Delivery Module from Brooks Instrument Company to exhibit the industry’s most accurate and reproducible deionized water vapor delivery module, along with its GF100 Series Mass Flow Controller with EtherCAT ® to improve semiconductor process yields. Brooks Instrument will showcase its new VDM300 vapor delivery module at SEMICON Taiwan 2017.
https://www.semi.org/en/press/semicon-west-2017-new-deionized-water-vapor-delivery-module-brooks-instrument
Company to exhibit the industry’s most accurate and reproducible deionized water vapor delivery module, along with its GF100 Series Mass Flow Controller with EtherCAT ® to improve semiconductor process yields. HATFIELD, Pa. Brooks Instrument will be exhibiting at SEMICON West 2017 with a new vaporization product, mass flow controllers with high-speed EtherCAT ®, and a broad range of other ...
https://www.ebay.com/p/1507960384
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