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https://www.advancedenergy.com/products/plasma-power-generators/rf-plasma-generators/apex-rf-power-delivery-systems/
The versatile Apex ® family of RF generators and power-delivery systems showcases a compact, modular design suitable for chamber mounting. Utilizing sophisticated RF-conversion technology, Apex RF generators and power-delivery systems offer enhanced product and process reliability.
https://www.advancedenergy.com/products/plasma-power-generators/rf-plasma-generators/paramount-rf-power-delivery-systems/
Plasma Power Generators. Paramount Industry-Leading, Repeatable Power Delivery for Core Plasma Applications . Paramount RF power generators combine frequency tuning, pulsing, and complete digital control. Full digital control for dynamic response to plasma changes; Customizable frequency from 400 kHz to 60 MHz and power from 100 W to 8 kW
https://ieeexplore.ieee.org/abstract/document/6726756/
Abstract: RF power delivery (RFPD) system is based on transmission of high power radio frequency waves. This is an emerging, far field Wireless Power Transfer (WPT) method, that has many advantages over other WPT methods like Induction and Microwave based, because of its safety, lack of interference and high efficiency at medium distance ranges.Author: M. Durairaj, M. Ramakrishnan
https://www.xppower.com/rf-power
Our RF power delivery solutions range from 100W to 80kW with frequencies from 20kHz to 60MHz, tailored to the end equipment or process from our wide range of standard off the shelf generator and impedance matching network designs.
https://www.frontiersin.org/articles/10.3389/fphy.2018.00115/full
Oct 12, 2018 · Integration of the power delivery system and the micro-thruster. Note that as a proof of concept prototype, practical issues such as board fabrication and material use, MOSFET gate drive circuit, all RF connectors, etc are not optimized for spaceflight conditions.Author: Wei Liang, Christine Charles, Luke Raymond, Alex Stuchbery, Kawin Surakitbovorn, Lei Gu, Rod Boswell...
https://www.academia.edu/24442448/RF_Power_Delivery_System
https://powerpulse.net/advanced-energy-industries-unveils-rf-power-delivery-system/
Jul 09, 2007 · Advanced Energy® Industries, Inc. (AE®) announced its newest power platform: the Paramount™ RF-power delivery system. Featuring what the company claims is unprecedented power-delivery accuracy and control for increasingly complex film stacks and fine feature sizes, the 3kW Paramount system is well suited for both etch and deposition processes in semiconductor, FPD, …
http://c3ps.gatech.edu/power-delivery-electronic-systems-pdes
Power Delivery for Electronic Systems (PDES) ... Power delivery for any electronic system consists of a source, network and load as shown. AC outlets, batteries, transducers and RF signals are various methods for generating the energy at the source. This energy needs to be rectified to generate DC voltage, which in turn needs to be up or down ...
https://www.impedans.com/sites/default/files/pdf_downloads/rf_matching_unit_characterization.pdf
RF Matching Network Characterization APPLICATION NOTE 1 In this application note we will focus on one critical component of a radio-frequency (RF) plasma process - ing equipments ’ power delivery system - the RF match - ing unit. The RF matching network used here consists of load and tune capacitors as well as an inductive coil.
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