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https://experts.umn.edu/en/publications/liquid-and-solid-precursor-delivery-systems-in-gas-phase-processe
TY - JOUR. T1 - Liquid and solid precursor delivery systems in gas phase processes. AU - Vahlas, Constantin. AU - Caussat, Brigitte. AU - Gladfelter, Wayne L.Author: Constantin Vahlas, Brigitte Caussat, Wayne L. Gladfelter, François Senocq, Elizabeth J. Gladfelter
https://www.sciencedirect.com/topics/engineering/liquid-precursor
The second system used for precursor delivery is direct liquid injection system. A direct liquid injection system has been described where the solution is injected by syringe directly into a vaporization chamber. The syringe can be replaced by volumetric pumps, mixing the solvent and precursor and delivering the solution in a constant fashion ...
https://sst.semiconductor-digest.com/2014/12/delivering-new-liquid-metalorganic-precursors-to-epi-and-cvd/
The same central delivery system can be used for trisilane and other liquid CVD precursors for silicon-based CVD for similar cost reduction. Carrier-gas-assisted precursor delivery. Liquid compounds with an RT vapor pressure between 1 and 400 mbar require carrier-gas-assisted delivery.
https://www.mtixtl.com/Bubbler/Evaporatorforliquidsourcesandchemicalprecursors-BL-SS.aspx
Bubbler / Evaporator for Liquid Precursors Delivery in CVD Processes (150, 300, 600 or 1000ml optional) - BL-SS Sale Price: Starting at USD$669.00 If you are international, please click this.
https://www.researchgate.net/publication/277414010_Liquid_and_Solid_Precursor_Delivery_Systems_in_Gas_Phase_Processes
The delivery rates of liquid or solid MOCVD precursors depend on the temperature of the liquid precursor inside its container which is also referred to as bubbler, the total pressure inside the ...
https://ugim.nanofab.utah.edu/files/formidable/Wednesday-Track-A-1.00PM-Craig-Noah1.pdf
Liquid Delivery & Material Properties • ALD/CVD/MOCVD precursors are reactive and pose physical and health risks. • Primary system priority is purgeability to remove trace liquid and vapor residues for: • Container replacement • Delivery System and process tool service • Liquids do not behave like gasses
https://www.researchgate.net/publication/334082307_Characterization_of_bubbler_performance_for_low-volatility_liquid_precursor_delivery
The delivery rates of liquid or solid MOCVD precursors depend on the temperature of the liquid precursor inside its container which is also referred to as bubbler, the total pressure inside the ...
https://ales.airliquide.com/precursors-distribution-candi
Candi™ Phase 2 is fitted with an internal day tank that allows the continuous distribution of the liquid precursors at a steady pressure, including during shuttle canister change-out. There are several Candi™ Phase 2 solutions: from the Candi™ Lite for research & R&D to the Candi™ Phase 2 pyrophoric with increased safety features.
https://advancedtech.airliquide.com/candi
The Candi system is designed to provide end users with a continuous supply of a low vapor pressure liquid precursor (>1 Torr) delivered at a steady pressure. Applications Typical applications: liquid precursor supply to Direct Liquid Injection (DLI), on-board bubbler or …
https://www.electronics-airliquide.com/our-offer/equipment-installations
Manufacturers in the electronics industry need premium equipment and installations to support their processes and assure the proper supply, storage, application and use of electronic materials (also called precursor molecules). An expert in the production and supply of gases, process chemicals and liquid precursors for electronics, Air Liquide offers the right equipment, uncompromised safety ...
https://www.annealsys.com/applications/dli-processes/vaporization-technologies-fg30804.html
The direct liquid injection technology was developed to overcome the limitation of conventional vaporization technologies like bubblers of vapor draw. Vapor draw In vapor draw the precursor container is the vaporizer and can be heated. There is no carrier gas flow inside the canister. Vapors can be mixed with carrier gas at container outlet.
https://www.mathesongas.com/electronics/gas-equipment
Equipment. As solution providers for Semiconductor Manufacturing, MATHESON offers equipment systems for ultra-purification, ashable hard mask, and liquid precursor delivery.. MATHESON Special Delivery Equipment and Systems: For Gas Delivery, Gas Purification, and Precursor Delivery in Electronics Fabrication.
https://www.idealvac.com/Atomic-Layer-Deposition-(ALD)-Liquid-Precursor-Vapor-Delivery-Cylinder-System/pp/P1010813
The controlled delivery of gas-phase vapor from a liquid precursor is needed in the processes of Chemical Vapor Deposition (CVD), Metalorganic Chemical Vapor Deposition (MOCVD), and Atomic Layer Deposition (ALD). These liquid vapor gas delivery cylinders contain an integrated bubbler to help contain the precursor vapor in a flow of buffer gas.
http://license.umn.edu/technologies/z05074_delivery-system-for-precursor-gas-in-chemical-vapor-deposition-cvd
Sublimation of Precursor Gas in the Fluidized Bed. In most CVD processes, the molecular precursor is a gas (e.g. SiH4) or a liquid (e.g. GaMe3) at room temperature. As the size and complexity of the precursor increase, the standard state at ambient conditions is solid.
https://www.criticalsystemsinc.com/
Since 1998, Critical Systems, Inc. (CSI) has been providing Gas and Chemical Delivery Systems, Gas Scrubber Abatement Systems, Orbital Welding Rental, Lease, Repair and Training Services, Facilities Management and Software, Gas and Chemical Supply, and Components related to process tool facilitation for Semiconductor, Biotech, Pharmaceutical and related industries.
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