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https://www.kinetics.net/process-tools/process-media-distribution-systems/cmp-slurry/
Slurry delivery is one expression of a focus on mission-critical manufacturing systems (the ‘trees’) in microelectronics manufacturing. Maintaining and exceeding the requirements of chemical mechanical planarization (CMP) processes centers on anticipating irregularities.
https://www.versummaterials.com/product/flowmaster-cmp-slurry-delivery-system-2/
Our FLOWMASTER® CMP Slurry Delivery System consistently blends and delivers CMP slurry. Redundant systems and a broad range of analytical capabilities help deliver the most uniform and accurate blend consistencies to the wafer. Tags: blending, chemical delivery, …
http://slurrydelivery.systems/
Slurry delivery for the most critical oxide, tungsten, polysilicon, STI and copper CMP processes. Slurry delivery are available for dispensing pre-mixed slurry materials, or for blending and dispensing very challenging slurry mixtures.
https://www.rhfs.com/images/emi/update/Slurry_Chemical-Mix_REV.pdf
The RHFS small-scale Slurry/Chemical Blend and Distribution Unit is designed to support one or two CMP or similar process tools. The SMDU/CMDU platform is applicable to both slurry and liquid chemistry applications. This system blends slurry or chemical from an on-board 20 liter (5 gallon) container with deionized water and (optionally)
https://www.megafluidsystems.com/
About Mega Fluid Systems. Founded in 1990, Mega Fluid Systems has extensive experience offering world-class chemical and slurry delivery equipment to the global semiconductor, LED, pharmaceutical, specialty chemicals, and solar/PV industries.
https://www.entegris.com/content/dam/shared-product-assets/sensing-and-control/technote-cmp-delivery-systems-1679.pdf
Chemical Mechanical Planarization (CMP) Contamination systems can utilize an open-loop, peristaltic pump control system for delivering slurry to the point-of-use polishing pads (see figure 1). In many cases, the polishing system flow rate is not directly measured or properly controlled, causing performance, maintenance and accuracy issues.
https://entrepix.com/news/Mega-Fluid-Systems-and-Entrepix-Join-Forces-to-Offer-Complete-CMP-System.php
Phoenix - (March 17, 2014) - Mega Fluid Systems Inc., a leading supplier of chemical and slurry delivery equipment, and Entrepix Inc., a leading provider of chemical mechanical polishing (CMP) equipment and process services, today announced a partnership agreement. The combined expertise of both teams has already led to the development of a complete CMP solution for a 200mm fab upgrade project.
https://patents.google.com/patent/CN102773804A/en
A CMP slurry mix and delivery system includes at least one container for holding a polishing agent; a pump connected to the container for pumping the polishing agent to a point of use; and a slurry dispersion unit installed between the pump and the point of use, wherein slurry dispersion unit provides megasonic energy that is capable of dispersing the polishing agent flowing through the slurry ...Author: 刘献文, 刘立中, 陈逸男
https://www.versummaterials.com/applications-processes/cmp-slurries/
CMP Solutions Versum Materials' enhanced portfolio of offerings to the chemical mechanical planarization (CMP) market provides an integrated solution to our customers in the IC segment. To complement our CMP slurries, we also offer post-CMP cleaning products and our FlowMaster CMP Slurry delivery system. View Product
https://www.sps-europe.com/bron/cms_file/145-CMP-Brochure-SPS-Europe-2018-web.pdf
CMP tool – possible monitoring point In-line refractive index is used as final slurry check and fault detection of potential DI water leakage or slurry cross-contamination Slurry 1, 2 ,3 from the global loop VMB –valve manifold box CMP tool DI Water Incoming H 2 O 2 Incoming slurry Blend phase in the local loop Process feed in the global ...File Size: 2MB
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